485023-HS2024-0-Nano- and Microfabrication





Root number 485023
Semester HS2024
Type of course Lecture
Allocation to subject Precision Engineering
Type of exam Oral exam
Title Nano- and Microfabrication
Description PREREQUISITES

• Basic material knowledge
• Basic physics courses knowledge
• Basic CAD knowledge

COURSE DESCRIPTION

• Introduction to Micro- & Nanofabrication
• Planar-based Processes (Litho, Coating, Etching, Fabrication Steps, etc.)
• Cleanroom - Lab
• Precision-Micromachining Processes
• Surface Modifications & Replication Processes
ILIAS-Link (Learning resource for course) Registrations are transmitted from CTS to ILIAS (no admission in ILIAS possible). ILIAS
Link to another web site
Lecturers Prof. Dr. Cédric BessirePrecision Engineering 
ECTS 3
Recognition as optional course possible No
Grading 1 to 6
 
Dates Monday 14:15-16:00 Weekly
Wednesday 29/1/2025 09:00-11:00
 
Rooms Seminarraum S465, Chemie, Biochemie und Pharmazie, DCBP
Plenarsaal 121 121, Precision Engineering
External rooms Collaborative Room 2 GUE24/26
 
Students please consult the detailed view for complete information on dates, rooms and planned podcasts.