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Root number
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485024 |
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Semester
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HS2024 |
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Type of course
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Lecture |
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Allocation to subject
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Precision Engineering |
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Type of exam
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Written exam |
| Title |
In-Situ Diagnostics |
| Description |
PREREQUISITES
• Basic knowledge in thin film deposition techniques
• Taste for multi-physics
ADDITIONAL INFORMATION
Literature will be provided at the beginning and throughout the course.
COURSE DESCRIPTION
In-Situ: «in the natural or original position or place»
The particularity of in-situ diagnostics lies in the constraint, that we cannot or do not want to move the object we are to characterize, in many cases we cannot or, again, don’t want to get in direct contact with the object.
The course will focus on in-situ diagnostics in the context of thin film deposition processes, such as
• Langmuir Probes
• Retarding Field Energy Analysers
• (Modified) Quartz Crystal Microbalances
• Optical Emission and Absorption Spectroscopy
• Energy-resolved Mass Spectroscopy
• Light Scattering Technique (Thomson, Rayleigh etc.)
• Stress Measurements
• Ellipsometry
The measured properties, electron density and temperature, ion density flux, and energy will be properly defined, and their influence on the properties of the deposited thin film discussed.
The required background knowledge in physics of plasma for thin film deposition processes will be introduced
The coursework will include experimental work employing selected techniques, for example, Langmuir probe measurement and result interpretation.
One very important aspect of in-situ diagnostics is the absence of normative work. The user of these techniques cannot rely on standards to perform meaningful measurements without much background knowledge. |
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ILIAS-Link (Learning resource for course)
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Registrations are transmitted from CTS to ILIAS (no admission in ILIAS possible).
ILIAS
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Link to another web site
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| Lecturers |
Prof. Dr.
Thomas Nelis, School of Biomedical and Precision Engineering (SBPE) ✉
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ECTS
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3 |
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Recognition as optional course possible
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No |
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Grading
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1 to 6 |
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| Dates |
Tuesday 15:15-17:00 Weekly
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Monday 7/10/2024 16:15-18:00
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Monday 14/10/2024 16:15-18:00
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Monday 28/10/2024 16:15-18:00
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Tuesday 14/1/2025 10:00-12:00
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| Rooms |
Plenarsaal 121 121, Precision Engineering
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| External rooms |
Collaborative Room 2 GUE24/26
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| Students please consult the detailed view for complete information on dates, rooms and planned podcasts. |
User:
Öffentlicher Bereich
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